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Optical diagnostics for thin film processing
| Autor principal: | |
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| Lenguaje: | eng |
| Publicado: |
Elsevier Science
2014
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/2254440 |
| _version_ | 1780953643494670336 |
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| author | Herman, Irving P |
| author_facet | Herman, Irving P |
| author_sort | Herman, Irving P |
| collection | CERN |
| id | cern-2254440 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2014 |
| publisher | Elsevier Science |
| record_format | invenio |
| spelling | cern-22544402021-04-21T19:18:39Zhttp://cds.cern.ch/record/2254440engHerman, Irving POptical diagnostics for thin film processingEngineeringElsevier Scienceoai:cds.cern.ch:22544402014 |
| spellingShingle | Engineering Herman, Irving P Optical diagnostics for thin film processing |
| title | Optical diagnostics for thin film processing |
| title_full | Optical diagnostics for thin film processing |
| title_fullStr | Optical diagnostics for thin film processing |
| title_full_unstemmed | Optical diagnostics for thin film processing |
| title_short | Optical diagnostics for thin film processing |
| title_sort | optical diagnostics for thin film processing |
| topic | Engineering |
| url | http://cds.cern.ch/record/2254440 |
| work_keys_str_mv | AT hermanirvingp opticaldiagnosticsforthinfilmprocessing |