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Principle and modelling of Transient Current Technique for interface traps characterization in monolithic pixel detectors obtained by CMOS-compatible wafer bonding

In the framework of monolithic silicon radiation detectors, a fabrication process based on a recently developed silicon wafer bonding technique at low temperature was proposed. Ideally, this new process would enable direct bonding of a read-out electronic chip wafer on a highly resistive silicon sub...

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Detalles Bibliográficos
Autores principales: Bronuzzi, J., Mapelli, A., Moll, M., Sallese, J.M.
Lenguaje:eng
Publicado: 2016
Materias:
XX
Acceso en línea:https://dx.doi.org/10.1088/1748-0221/11/08/P08016
http://cds.cern.ch/record/2255757
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author Bronuzzi, J.
Mapelli, A.
Moll, M.
Sallese, J.M.
author_facet Bronuzzi, J.
Mapelli, A.
Moll, M.
Sallese, J.M.
author_sort Bronuzzi, J.
collection CERN
description In the framework of monolithic silicon radiation detectors, a fabrication process based on a recently developed silicon wafer bonding technique at low temperature was proposed. Ideally, this new process would enable direct bonding of a read-out electronic chip wafer on a highly resistive silicon substrate wafer, which is expected to present many advantages since it would combine high performance IC's with high sensitive ultra-low doped bulk silicon detectors. But electrical properties of the bonded interface are critical for this kind of application since the mobile charges generated by radiation inside the bonded bulk are expected to transit through the interface in order to be collected by the read-out electronics. In this work, we propose to explore and develop a model for the so-called Transient Current Technique (TCT) to identify the presence of deep traps at the bonded interface. For this purpose, we consider a simple PIN diode reversely biased where the ultra-low doped active region of interest is set in full depletion. In a first step, Synopsys Sentaurus TCAD is used to evaluate the soundness of this technique for interface traps characterization such as it may happen in bonded interfaces. Next, an analytical model is developed in details to give a better insight into the physics behind the TCT for interface layers. Further, this can be used as a simple tool to evidence what are the relevant parameters influencing the TCT signal and to set the basis for preliminary characterizations.
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institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2016
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spelling cern-22557572022-08-10T12:47:05Zdoi:10.1088/1748-0221/11/08/P08016http://cds.cern.ch/record/2255757engBronuzzi, J.Mapelli, A.Moll, M.Sallese, J.M.Principle and modelling of Transient Current Technique for interface traps characterization in monolithic pixel detectors obtained by CMOS-compatible wafer bondingXXIn the framework of monolithic silicon radiation detectors, a fabrication process based on a recently developed silicon wafer bonding technique at low temperature was proposed. Ideally, this new process would enable direct bonding of a read-out electronic chip wafer on a highly resistive silicon substrate wafer, which is expected to present many advantages since it would combine high performance IC's with high sensitive ultra-low doped bulk silicon detectors. But electrical properties of the bonded interface are critical for this kind of application since the mobile charges generated by radiation inside the bonded bulk are expected to transit through the interface in order to be collected by the read-out electronics. In this work, we propose to explore and develop a model for the so-called Transient Current Technique (TCT) to identify the presence of deep traps at the bonded interface. For this purpose, we consider a simple PIN diode reversely biased where the ultra-low doped active region of interest is set in full depletion. In a first step, Synopsys Sentaurus TCAD is used to evaluate the soundness of this technique for interface traps characterization such as it may happen in bonded interfaces. Next, an analytical model is developed in details to give a better insight into the physics behind the TCT for interface layers. Further, this can be used as a simple tool to evidence what are the relevant parameters influencing the TCT signal and to set the basis for preliminary characterizations.oai:cds.cern.ch:22557572016
spellingShingle XX
Bronuzzi, J.
Mapelli, A.
Moll, M.
Sallese, J.M.
Principle and modelling of Transient Current Technique for interface traps characterization in monolithic pixel detectors obtained by CMOS-compatible wafer bonding
title Principle and modelling of Transient Current Technique for interface traps characterization in monolithic pixel detectors obtained by CMOS-compatible wafer bonding
title_full Principle and modelling of Transient Current Technique for interface traps characterization in monolithic pixel detectors obtained by CMOS-compatible wafer bonding
title_fullStr Principle and modelling of Transient Current Technique for interface traps characterization in monolithic pixel detectors obtained by CMOS-compatible wafer bonding
title_full_unstemmed Principle and modelling of Transient Current Technique for interface traps characterization in monolithic pixel detectors obtained by CMOS-compatible wafer bonding
title_short Principle and modelling of Transient Current Technique for interface traps characterization in monolithic pixel detectors obtained by CMOS-compatible wafer bonding
title_sort principle and modelling of transient current technique for interface traps characterization in monolithic pixel detectors obtained by cmos-compatible wafer bonding
topic XX
url https://dx.doi.org/10.1088/1748-0221/11/08/P08016
http://cds.cern.ch/record/2255757
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AT mapellia principleandmodellingoftransientcurrenttechniqueforinterfacetrapscharacterizationinmonolithicpixeldetectorsobtainedbycmoscompatiblewaferbonding
AT mollm principleandmodellingoftransientcurrenttechniqueforinterfacetrapscharacterizationinmonolithicpixeldetectorsobtainedbycmoscompatiblewaferbonding
AT sallesejm principleandmodellingoftransientcurrenttechniqueforinterfacetrapscharacterizationinmonolithicpixeldetectorsobtainedbycmoscompatiblewaferbonding