Cargando…
Sputtering by particle bombardment
| Autores principales: | , , , |
|---|---|
| Lenguaje: | eng |
| Publicado: |
Springer
1991
|
| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1007/3-540-53428-8 http://cds.cern.ch/record/227351 |
| _version_ | 1780883768066703360 |
|---|---|
| author | Hauffe, E Hofer, W O Wittmaack, Klaus Behrisch, Rainer |
| author_facet | Hauffe, E Hofer, W O Wittmaack, Klaus Behrisch, Rainer |
| author_sort | Hauffe, E |
| collection | CERN |
| id | cern-227351 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1991 |
| publisher | Springer |
| record_format | invenio |
| spelling | cern-2273512021-04-22T04:22:06Zdoi:10.1007/3-540-53428-8http://cds.cern.ch/record/227351engHauffe, EHofer, W OWittmaack, KlausBehrisch, RainerSputtering by particle bombardmentEngineeringSpringeroai:cds.cern.ch:2273511991 |
| spellingShingle | Engineering Hauffe, E Hofer, W O Wittmaack, Klaus Behrisch, Rainer Sputtering by particle bombardment |
| title | Sputtering by particle bombardment |
| title_full | Sputtering by particle bombardment |
| title_fullStr | Sputtering by particle bombardment |
| title_full_unstemmed | Sputtering by particle bombardment |
| title_short | Sputtering by particle bombardment |
| title_sort | sputtering by particle bombardment |
| topic | Engineering |
| url | https://dx.doi.org/10.1007/3-540-53428-8 http://cds.cern.ch/record/227351 |
| work_keys_str_mv | AT hauffee sputteringbyparticlebombardment AT hoferwo sputteringbyparticlebombardment AT wittmaackklaus sputteringbyparticlebombardment AT behrischrainer sputteringbyparticlebombardment |