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Sputtering by particle bombardment

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Detalles Bibliográficos
Autores principales:	Hauffe, E, Hofer, W O, Wittmaack, Klaus, Behrisch, Rainer
Lenguaje:	eng
Publicado:	Springer 1991
Materias:	Engineering
Acceso en línea:	https://dx.doi.org/10.1007/3-540-53428-8 http://cds.cern.ch/record/227351

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