Three-dimensional integration of semiconductors: processing, materials, and applications

Detalles Bibliográficos
Autores principales: Kondo, Kazuo, Kada, Morihiro, Takahashi, Kenji
Lenguaje:eng
Publicado: Springer 2015
Materias:
Engineering
Acceso en línea:http://cds.cern.ch/record/2279351
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author Kondo, Kazuo
Kada, Morihiro
Takahashi, Kenji
author_facet Kondo, Kazuo
Kada, Morihiro
Takahashi, Kenji
author_sort Kondo, Kazuo
collection CERN
id cern-2279351
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2015
publisher Springer
record_format invenio
spelling cern-22793512021-04-21T19:06:35Zhttp://cds.cern.ch/record/2279351engKondo, KazuoKada, MorihiroTakahashi, KenjiThree-dimensional integration of semiconductors: processing, materials, and applicationsEngineeringSpringeroai:cds.cern.ch:22793512015
spellingShingle Engineering
Kondo, Kazuo
Kada, Morihiro
Takahashi, Kenji
Three-dimensional integration of semiconductors: processing, materials, and applications
title Three-dimensional integration of semiconductors: processing, materials, and applications
title_full Three-dimensional integration of semiconductors: processing, materials, and applications
title_fullStr Three-dimensional integration of semiconductors: processing, materials, and applications
title_full_unstemmed Three-dimensional integration of semiconductors: processing, materials, and applications
title_short Three-dimensional integration of semiconductors: processing, materials, and applications
title_sort three-dimensional integration of semiconductors: processing, materials, and applications
topic Engineering
url http://cds.cern.ch/record/2279351
work_keys_str_mv AT kondokazuo threedimensionalintegrationofsemiconductorsprocessingmaterialsandapplications
AT kadamorihiro threedimensionalintegrationofsemiconductorsprocessingmaterialsandapplications
AT takahashikenji threedimensionalintegrationofsemiconductorsprocessingmaterialsandapplications

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