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Three-dimensional integration of semiconductors: processing, materials, and applications

Detalles Bibliográficos
Autores principales:	Kondo, Kazuo, Kada, Morihiro, Takahashi, Kenji
Lenguaje:	eng
Publicado:	Springer 2015
Materias:	Engineering
Acceso en línea:	http://cds.cern.ch/record/2279351

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