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Diazonaphthoquinone-based resists
| Autor principal: | |
|---|---|
| Lenguaje: | eng |
| Publicado: |
Society of Photo-Optical Instrumentation Engineers (SPIE)
1993
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/2283907 |
| _version_ | 1780955795770310656 |
|---|---|
| author | Dammel, Ralph R |
| author_facet | Dammel, Ralph R |
| author_sort | Dammel, Ralph R |
| collection | CERN |
| id | cern-2283907 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1993 |
| publisher | Society of Photo-Optical Instrumentation Engineers (SPIE) |
| record_format | invenio |
| spelling | cern-22839072021-04-21T19:03:23Zhttp://cds.cern.ch/record/2283907engDammel, Ralph RDiazonaphthoquinone-based resistsXXSociety of Photo-Optical Instrumentation Engineers (SPIE)oai:cds.cern.ch:22839071993 |
| spellingShingle | XX Dammel, Ralph R Diazonaphthoquinone-based resists |
| title | Diazonaphthoquinone-based resists |
| title_full | Diazonaphthoquinone-based resists |
| title_fullStr | Diazonaphthoquinone-based resists |
| title_full_unstemmed | Diazonaphthoquinone-based resists |
| title_short | Diazonaphthoquinone-based resists |
| title_sort | diazonaphthoquinone-based resists |
| topic | XX |
| url | http://cds.cern.ch/record/2283907 |
| work_keys_str_mv | AT dammelralphr diazonaphthoquinonebasedresists |