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Molecular theory of lithography
| Autor principal: | |
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| Lenguaje: | eng |
| Publicado: |
Society of Photo-Optical Instrumentation Engineers
2015
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/2288892 |
| _version_ | 1780956222399184896 |
|---|---|
| author | Okoroanyanwu, Uzodinma |
| author_facet | Okoroanyanwu, Uzodinma |
| author_sort | Okoroanyanwu, Uzodinma |
| collection | CERN |
| id | cern-2288892 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2015 |
| publisher | Society of Photo-Optical Instrumentation Engineers |
| record_format | invenio |
| spelling | cern-22888922021-04-21T19:02:06Zhttp://cds.cern.ch/record/2288892engOkoroanyanwu, UzodinmaMolecular theory of lithographyEngineeringSociety of Photo-Optical Instrumentation Engineersoai:cds.cern.ch:22888922015 |
| spellingShingle | Engineering Okoroanyanwu, Uzodinma Molecular theory of lithography |
| title | Molecular theory of lithography |
| title_full | Molecular theory of lithography |
| title_fullStr | Molecular theory of lithography |
| title_full_unstemmed | Molecular theory of lithography |
| title_short | Molecular theory of lithography |
| title_sort | molecular theory of lithography |
| topic | Engineering |
| url | http://cds.cern.ch/record/2288892 |
| work_keys_str_mv | AT okoroanyanwuuzodinma moleculartheoryoflithography |