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Introduction to metrology applications in IC manufacturing
| Autores principales: | , , |
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| Lenguaje: | eng |
| Publicado: |
Society of Photo-Optical Instrumentation Engineers
2015
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/2288896 |
| _version_ | 1780956223270551552 |
|---|---|
| author | Su, Bo Solecky, Eric Vaid, Alok |
| author_facet | Su, Bo Solecky, Eric Vaid, Alok |
| author_sort | Su, Bo |
| collection | CERN |
| id | cern-2288896 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2015 |
| publisher | Society of Photo-Optical Instrumentation Engineers |
| record_format | invenio |
| spelling | cern-22888962021-04-21T19:02:05Zhttp://cds.cern.ch/record/2288896engSu, BoSolecky, EricVaid, AlokIntroduction to metrology applications in IC manufacturingEngineeringSociety of Photo-Optical Instrumentation Engineersoai:cds.cern.ch:22888962015 |
| spellingShingle | Engineering Su, Bo Solecky, Eric Vaid, Alok Introduction to metrology applications in IC manufacturing |
| title | Introduction to metrology applications in IC manufacturing |
| title_full | Introduction to metrology applications in IC manufacturing |
| title_fullStr | Introduction to metrology applications in IC manufacturing |
| title_full_unstemmed | Introduction to metrology applications in IC manufacturing |
| title_short | Introduction to metrology applications in IC manufacturing |
| title_sort | introduction to metrology applications in ic manufacturing |
| topic | Engineering |
| url | http://cds.cern.ch/record/2288896 |
| work_keys_str_mv | AT subo introductiontometrologyapplicationsinicmanufacturing AT soleckyeric introductiontometrologyapplicationsinicmanufacturing AT vaidalok introductiontometrologyapplicationsinicmanufacturing |