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Sputtering by beam-produced ions
| Autor principal: | |
|---|---|
| Lenguaje: | eng |
| Publicado: |
1969
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| Acceso en línea: | http://cds.cern.ch/record/2293572 |
| _version_ | 1780956564706820096 |
|---|---|
| author | Koziol, H |
| author_facet | Koziol, H |
| author_sort | Koziol, H |
| collection | CERN |
| id | cern-2293572 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1969 |
| record_format | invenio |
| spelling | cern-22935722019-09-30T06:29:59Zhttp://cds.cern.ch/record/2293572engKoziol, HSputtering by beam-produced ionsCERN-SI-Int-DL-69-11oai:cds.cern.ch:22935721969 |
| spellingShingle | Koziol, H Sputtering by beam-produced ions |
| title | Sputtering by beam-produced ions |
| title_full | Sputtering by beam-produced ions |
| title_fullStr | Sputtering by beam-produced ions |
| title_full_unstemmed | Sputtering by beam-produced ions |
| title_short | Sputtering by beam-produced ions |
| title_sort | sputtering by beam-produced ions |
| url | http://cds.cern.ch/record/2293572 |
| work_keys_str_mv | AT koziolh sputteringbybeamproducedions |