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Silicon anodization as a structuring technique: literature review, modeling and experiments
| Autor principal: | |
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| Lenguaje: | eng |
| Publicado: |
Springer
2017
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/2297758 |
| _version_ | 1780956912500604928 |
|---|---|
| author | Ivanov, Alexey |
| author_facet | Ivanov, Alexey |
| author_sort | Ivanov, Alexey |
| collection | CERN |
| id | cern-2297758 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2017 |
| publisher | Springer |
| record_format | invenio |
| spelling | cern-22977582021-04-21T18:58:09Zhttp://cds.cern.ch/record/2297758engIvanov, AlexeySilicon anodization as a structuring technique: literature review, modeling and experimentsChemical Physics and ChemistrySpringeroai:cds.cern.ch:22977582017 |
| spellingShingle | Chemical Physics and Chemistry Ivanov, Alexey Silicon anodization as a structuring technique: literature review, modeling and experiments |
| title | Silicon anodization as a structuring technique: literature review, modeling and experiments |
| title_full | Silicon anodization as a structuring technique: literature review, modeling and experiments |
| title_fullStr | Silicon anodization as a structuring technique: literature review, modeling and experiments |
| title_full_unstemmed | Silicon anodization as a structuring technique: literature review, modeling and experiments |
| title_short | Silicon anodization as a structuring technique: literature review, modeling and experiments |
| title_sort | silicon anodization as a structuring technique: literature review, modeling and experiments |
| topic | Chemical Physics and Chemistry |
| url | http://cds.cern.ch/record/2297758 |
| work_keys_str_mv | AT ivanovalexey siliconanodizationasastructuringtechniqueliteraturereviewmodelingandexperiments |