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Annealing behaviour of InP and GaP during and after heavy-ion implantation at different temperatures and doses
Autores principales: | , , , , , |
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Lenguaje: | eng |
Publicado: |
1993
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/253580 |
_version_ | 1780885672626749440 |
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author | Jahn, S G Wahl, U Hofsäss, H C Winter, S Restle, M Recknagel, E |
author_facet | Jahn, S G Wahl, U Hofsäss, H C Winter, S Restle, M Recknagel, E |
author_sort | Jahn, S G |
collection | CERN |
id | cern-253580 |
institution | Organización Europea para la Investigación Nuclear |
language | eng |
publishDate | 1993 |
record_format | invenio |
spelling | cern-2535802019-09-30T06:29:59Zhttp://cds.cern.ch/record/253580engJahn, S GWahl, UHofsäss, H CWinter, SRestle, MRecknagel, EAnnealing behaviour of InP and GaP during and after heavy-ion implantation at different temperatures and dosesOther Fields of PhysicsCERN-PPE-93-163oai:cds.cern.ch:2535801993-08-25 |
spellingShingle | Other Fields of Physics Jahn, S G Wahl, U Hofsäss, H C Winter, S Restle, M Recknagel, E Annealing behaviour of InP and GaP during and after heavy-ion implantation at different temperatures and doses |
title | Annealing behaviour of InP and GaP during and after heavy-ion implantation at different temperatures and doses |
title_full | Annealing behaviour of InP and GaP during and after heavy-ion implantation at different temperatures and doses |
title_fullStr | Annealing behaviour of InP and GaP during and after heavy-ion implantation at different temperatures and doses |
title_full_unstemmed | Annealing behaviour of InP and GaP during and after heavy-ion implantation at different temperatures and doses |
title_short | Annealing behaviour of InP and GaP during and after heavy-ion implantation at different temperatures and doses |
title_sort | annealing behaviour of inp and gap during and after heavy-ion implantation at different temperatures and doses |
topic | Other Fields of Physics |
url | http://cds.cern.ch/record/253580 |
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