Cargando…

Annealing behaviour of InP and GaP during and after heavy-ion implantation at different temperatures and doses

Detalles Bibliográficos
Autores principales: Jahn, S G, Wahl, U, Hofsäss, H C, Winter, S, Restle, M, Recknagel, E
Lenguaje:eng
Publicado: 1993
Materias:
Acceso en línea:http://cds.cern.ch/record/253580
_version_ 1780885672626749440
author Jahn, S G
Wahl, U
Hofsäss, H C
Winter, S
Restle, M
Recknagel, E
author_facet Jahn, S G
Wahl, U
Hofsäss, H C
Winter, S
Restle, M
Recknagel, E
author_sort Jahn, S G
collection CERN
id cern-253580
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 1993
record_format invenio
spelling cern-2535802019-09-30T06:29:59Zhttp://cds.cern.ch/record/253580engJahn, S GWahl, UHofsäss, H CWinter, SRestle, MRecknagel, EAnnealing behaviour of InP and GaP during and after heavy-ion implantation at different temperatures and dosesOther Fields of PhysicsCERN-PPE-93-163oai:cds.cern.ch:2535801993-08-25
spellingShingle Other Fields of Physics
Jahn, S G
Wahl, U
Hofsäss, H C
Winter, S
Restle, M
Recknagel, E
Annealing behaviour of InP and GaP during and after heavy-ion implantation at different temperatures and doses
title Annealing behaviour of InP and GaP during and after heavy-ion implantation at different temperatures and doses
title_full Annealing behaviour of InP and GaP during and after heavy-ion implantation at different temperatures and doses
title_fullStr Annealing behaviour of InP and GaP during and after heavy-ion implantation at different temperatures and doses
title_full_unstemmed Annealing behaviour of InP and GaP during and after heavy-ion implantation at different temperatures and doses
title_short Annealing behaviour of InP and GaP during and after heavy-ion implantation at different temperatures and doses
title_sort annealing behaviour of inp and gap during and after heavy-ion implantation at different temperatures and doses
topic Other Fields of Physics
url http://cds.cern.ch/record/253580
work_keys_str_mv AT jahnsg annealingbehaviourofinpandgapduringandafterheavyionimplantationatdifferenttemperaturesanddoses
AT wahlu annealingbehaviourofinpandgapduringandafterheavyionimplantationatdifferenttemperaturesanddoses
AT hofsasshc annealingbehaviourofinpandgapduringandafterheavyionimplantationatdifferenttemperaturesanddoses
AT winters annealingbehaviourofinpandgapduringandafterheavyionimplantationatdifferenttemperaturesanddoses
AT restlem annealingbehaviourofinpandgapduringandafterheavyionimplantationatdifferenttemperaturesanddoses
AT recknagele annealingbehaviourofinpandgapduringandafterheavyionimplantationatdifferenttemperaturesanddoses