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Annealing behaviour of InP and GaP during and after heavy-ion implantation at different temperatures and doses
Autores principales: | Jahn, S G, Wahl, U, Hofsäss, H C, Winter, S, Restle, M, Recknagel, E |
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Lenguaje: | eng |
Publicado: |
1993
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/253580 |
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