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New insulator film of integrated capacitor for a silicon strip detector

Detalles Bibliográficos
Autores principales:	Okuno, S, Ikeda, H, Akamine, T, Saitô, Y, Kado, M, Kojima, Y
Lenguaje:	eng
Publicado:	1993
Materias:	Detectors and Experimental Techniques
Acceso en línea:	http://cds.cern.ch/record/259257

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