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Optical physics for nanolithography
| Autor principal: | |
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| Lenguaje: | eng |
| Publicado: |
Society of Photo-Optical Instrumentation Engineers (SPIE)
2018
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/2623645 |
| _version_ | 1780958726438518784 |
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| author | Yen, Anthony |
| author_facet | Yen, Anthony |
| author_sort | Yen, Anthony |
| collection | CERN |
| id | cern-2623645 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2018 |
| publisher | Society of Photo-Optical Instrumentation Engineers (SPIE) |
| record_format | invenio |
| spelling | cern-26236452021-04-21T18:46:37Zhttp://cds.cern.ch/record/2623645engYen, AnthonyOptical physics for nanolithographyOther Fields of PhysicsSociety of Photo-Optical Instrumentation Engineers (SPIE)oai:cds.cern.ch:26236452018 |
| spellingShingle | Other Fields of Physics Yen, Anthony Optical physics for nanolithography |
| title | Optical physics for nanolithography |
| title_full | Optical physics for nanolithography |
| title_fullStr | Optical physics for nanolithography |
| title_full_unstemmed | Optical physics for nanolithography |
| title_short | Optical physics for nanolithography |
| title_sort | optical physics for nanolithography |
| topic | Other Fields of Physics |
| url | http://cds.cern.ch/record/2623645 |
| work_keys_str_mv | AT yenanthony opticalphysicsfornanolithography |