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Characterization of a depleted monolithic pixel sensors in 150 nm CMOS technology for the ATLAS Inner Tracker upgrade
This work reports on design and performance of a depleted monolithic active pixel sensor (DMAPS) prototype manufactured in the LFoundry 150 nm CMOS process. DMAPS exploit high voltage and/or high resistivity inclusion of modern CMOS technologies to achieve substantial depletion in the sensing volume...
Autores principales: | , , , , , , , , , , , , , , , , , , , , , |
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Formato: | info:eu-repo/semantics/article |
Lenguaje: | eng |
Publicado: |
Nucl. Instrum. Methods Phys. Res., A
2018
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Materias: | |
Acceso en línea: | https://dx.doi.org/10.1016/j.nima.2018.11.009 http://cds.cern.ch/record/2624790 |