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Simulation of deposition processes with PECVD apparatus
| Autores principales: | , |
|---|---|
| Lenguaje: | eng |
| Publicado: |
Nova Science Publishers
2012
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/2664736 |
| _version_ | 1780961910565371904 |
|---|---|
| author | Geiser, Juergen Arab, Meraa |
| author_facet | Geiser, Juergen Arab, Meraa |
| author_sort | Geiser, Juergen |
| collection | CERN |
| id | cern-2664736 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2012 |
| publisher | Nova Science Publishers |
| record_format | invenio |
| spelling | cern-26647362021-04-21T18:28:24Zhttp://cds.cern.ch/record/2664736engGeiser, JuergenArab, MeraaSimulation of deposition processes with PECVD apparatusEngineeringNova Science Publishersoai:cds.cern.ch:26647362012 |
| spellingShingle | Engineering Geiser, Juergen Arab, Meraa Simulation of deposition processes with PECVD apparatus |
| title | Simulation of deposition processes with PECVD apparatus |
| title_full | Simulation of deposition processes with PECVD apparatus |
| title_fullStr | Simulation of deposition processes with PECVD apparatus |
| title_full_unstemmed | Simulation of deposition processes with PECVD apparatus |
| title_short | Simulation of deposition processes with PECVD apparatus |
| title_sort | simulation of deposition processes with pecvd apparatus |
| topic | Engineering |
| url | http://cds.cern.ch/record/2664736 |
| work_keys_str_mv | AT geiserjuergen simulationofdepositionprocesseswithpecvdapparatus AT arabmeraa simulationofdepositionprocesseswithpecvdapparatus |