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The Monopix chips: Depleted monolithic active pixel sensors with a column-drain read-out architecture for the ATLAS Inner Tracker upgrade

Two different depleted monolithic CMOS active pixel sensor (DMAPS) prototypes with a fully synchronous column-drain read-out architecture were designed and tested: LF-Monopix and TJ-Monopix. These chips are part of a R&D effort towards a suitable implementation of a CMOS DMAPS for the HL-LHC ATL...

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Detalles Bibliográficos
Autores principales: Caicedo, I., Barbero, M., Barrillon, P., Berdalovic, I., Bhat, S., Bespin, C., Breugnon, P., Cardella, R., Chen, Z., Degerli, Y., Dingfelder, J., Godiot, S., Guilloux, F., Hirono, T., Hemperek, T., Hãijgging, F., Krãijger, H., Kugathasan, T., Moustakas, K., Pangaud, P., Pernegger, H., Riedler, P., Rozanov, A., Rymaszewski, P., Schwemling, P., Snoeys, W., Vandenbroucke, M., Wang, T., Wermes, N.
Lenguaje:eng
Publicado: 2019
Materias:
Acceso en línea:https://dx.doi.org/10.1088/1748-0221/14/06/C06006
http://cds.cern.ch/record/2665944
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author Caicedo, I.
Barbero, M.
Barrillon, P.
Berdalovic, I.
Bhat, S.
Bespin, C.
Breugnon, P.
Cardella, R.
Chen, Z.
Degerli, Y.
Dingfelder, J.
Godiot, S.
Guilloux, F.
Hirono, T.
Hemperek, T.
Hãijgging, F.
Krãijger, H.
Kugathasan, T.
Moustakas, K.
Pangaud, P.
Pernegger, H.
Riedler, P.
Rozanov, A.
Rymaszewski, P.
Schwemling, P.
Snoeys, W.
Vandenbroucke, M.
Wang, T.
Wermes, N.
author_facet Caicedo, I.
Barbero, M.
Barrillon, P.
Berdalovic, I.
Bhat, S.
Bespin, C.
Breugnon, P.
Cardella, R.
Chen, Z.
Degerli, Y.
Dingfelder, J.
Godiot, S.
Guilloux, F.
Hirono, T.
Hemperek, T.
Hãijgging, F.
Krãijger, H.
Kugathasan, T.
Moustakas, K.
Pangaud, P.
Pernegger, H.
Riedler, P.
Rozanov, A.
Rymaszewski, P.
Schwemling, P.
Snoeys, W.
Vandenbroucke, M.
Wang, T.
Wermes, N.
author_sort Caicedo, I.
collection CERN
description Two different depleted monolithic CMOS active pixel sensor (DMAPS) prototypes with a fully synchronous column-drain read-out architecture were designed and tested: LF-Monopix and TJ-Monopix. These chips are part of a R&D effort towards a suitable implementation of a CMOS DMAPS for the HL-LHC ATLAS Inner Tracker. LF-Monopix was developed using a 150nm CMOS process on a highly resistive substrate (>2 kΩ cm), while TJ-Monopix was fabricated using a modified 180 nm CMOS process with a 1 kΩ cm epi-layer for depletion. The chips differ in their front-end design, biasing scheme, pixel pitch, dimensions of the collecting electrode relative to the pixel size (large and small electrode design, respectively) and the placement of read-out electronics within such electrode. Both chips were operational after thinning down to 100 μm and additional back-side processing in LF-Monopix for total bulk depletion. The results in this work include measurements of their leakage current, noise, threshold dispersion, response to minimum ionizing particles and efficiency in test beam campaigns. In addition, the outcome from measurements after irradiation with neutrons up to a dose of 1×1015 neq / cm2 and its implications for future designs are discussed.
id cern-2665944
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2019
record_format invenio
spelling cern-26659442022-06-04T02:08:35Zdoi:10.1088/1748-0221/14/06/C06006http://cds.cern.ch/record/2665944engCaicedo, I.Barbero, M.Barrillon, P.Berdalovic, I.Bhat, S.Bespin, C.Breugnon, P.Cardella, R.Chen, Z.Degerli, Y.Dingfelder, J.Godiot, S.Guilloux, F.Hirono, T.Hemperek, T.Hãijgging, F.Krãijger, H.Kugathasan, T.Moustakas, K.Pangaud, P.Pernegger, H.Riedler, P.Rozanov, A.Rymaszewski, P.Schwemling, P.Snoeys, W.Vandenbroucke, M.Wang, T.Wermes, N.The Monopix chips: Depleted monolithic active pixel sensors with a column-drain read-out architecture for the ATLAS Inner Tracker upgradephysics.ins-detDetectors and Experimental TechniquesTwo different depleted monolithic CMOS active pixel sensor (DMAPS) prototypes with a fully synchronous column-drain read-out architecture were designed and tested: LF-Monopix and TJ-Monopix. These chips are part of a R&D effort towards a suitable implementation of a CMOS DMAPS for the HL-LHC ATLAS Inner Tracker. LF-Monopix was developed using a 150nm CMOS process on a highly resistive substrate (>2 kΩ cm), while TJ-Monopix was fabricated using a modified 180 nm CMOS process with a 1 kΩ cm epi-layer for depletion. The chips differ in their front-end design, biasing scheme, pixel pitch, dimensions of the collecting electrode relative to the pixel size (large and small electrode design, respectively) and the placement of read-out electronics within such electrode. Both chips were operational after thinning down to 100 μm and additional back-side processing in LF-Monopix for total bulk depletion. The results in this work include measurements of their leakage current, noise, threshold dispersion, response to minimum ionizing particles and efficiency in test beam campaigns. In addition, the outcome from measurements after irradiation with neutrons up to a dose of 1×1015 neq / cm2 and its implications for future designs are discussed.Two different depleted monolithic CMOS active pixel sensor (DMAPS) prototypes with a fully synchronous column-drain read-out architecture were designed and tested: LF-Monopix and TJ-Monopix. These chips are part of a R&D effort towards a suitable implementation of a CMOS DMAPS for the HL-LHC ATLAS Inner Tracker. LF-Monopix was developed using a 150nm CMOS process on a highly resistive substrate (>2 kΩ cm), while TJ-Monopix was fabricated using a modified 180 nm CMOS process with a 1 kΩ cm epi-layer for depletion. The chips differ in their front-end design, biasing scheme, pixel pitch, dimensions of the collecting electrode relative to the pixel size (large and small electrode design, respectively) and the placement of read-out electronics within such electrode. Both chips were operational after thinning down to 100 μm and additional back-side processing in LF-Monopix for total bulk depletion. The results in this work include measurements of their leakage current, noise, threshold dispersion, response to minimum ionizing particles and efficiency in test beam campaigns. In addition, the outcome from measurements after irradiation with neutrons up to a dose of 1×1015 neq / cm2 and its implications for future designs are discussed.Two different depleted monolithic CMOS active pixel sensor (DMAPS) prototypes with a fully synchronous column-drain read-out architecture were designed and tested: LF-Monopix and TJ-Monopix. These chips are part of a R\&D effort towards a suitable implementation of a CMOS DMAPS for the HL-LHC ATLAS Inner Tracker. LF-Monopix was developed using a 150nm CMOS process on a highly resistive substrate (>2 k$\Omega\,$cm), while TJ-Monopix was fabricated using a modified 180 nm CMOS process with a 1 k$\Omega\,$cm epi-layer for depletion. The chips differ in their front-end design, biasing scheme, pixel pitch, dimensions of the collecting electrode relative to the pixel size (large and small electrode design, respectively) and the placement of read-out electronics within such electrode. Both chips were operational after thinning down to 100 $\mathrm{\mu}$m and additional back-side processing in LF-Monopix for total bulk depletion. The results in this work include measurements of their leakage current, noise, threshold dispersion, response to minimum ionizing particles and efficiency in test beam campaigns. In addition, the outcome from measurements after irradiation with neutrons up to a dose of $1\times10^{15}\,\mathrm{n_{eq} / cm}^{2}$ and its implications for future designs are discussed.arXiv:1902.03679oai:cds.cern.ch:26659442019-02-10
spellingShingle physics.ins-det
Detectors and Experimental Techniques
Caicedo, I.
Barbero, M.
Barrillon, P.
Berdalovic, I.
Bhat, S.
Bespin, C.
Breugnon, P.
Cardella, R.
Chen, Z.
Degerli, Y.
Dingfelder, J.
Godiot, S.
Guilloux, F.
Hirono, T.
Hemperek, T.
Hãijgging, F.
Krãijger, H.
Kugathasan, T.
Moustakas, K.
Pangaud, P.
Pernegger, H.
Riedler, P.
Rozanov, A.
Rymaszewski, P.
Schwemling, P.
Snoeys, W.
Vandenbroucke, M.
Wang, T.
Wermes, N.
The Monopix chips: Depleted monolithic active pixel sensors with a column-drain read-out architecture for the ATLAS Inner Tracker upgrade
title The Monopix chips: Depleted monolithic active pixel sensors with a column-drain read-out architecture for the ATLAS Inner Tracker upgrade
title_full The Monopix chips: Depleted monolithic active pixel sensors with a column-drain read-out architecture for the ATLAS Inner Tracker upgrade
title_fullStr The Monopix chips: Depleted monolithic active pixel sensors with a column-drain read-out architecture for the ATLAS Inner Tracker upgrade
title_full_unstemmed The Monopix chips: Depleted monolithic active pixel sensors with a column-drain read-out architecture for the ATLAS Inner Tracker upgrade
title_short The Monopix chips: Depleted monolithic active pixel sensors with a column-drain read-out architecture for the ATLAS Inner Tracker upgrade
title_sort monopix chips: depleted monolithic active pixel sensors with a column-drain read-out architecture for the atlas inner tracker upgrade
topic physics.ins-det
Detectors and Experimental Techniques
url https://dx.doi.org/10.1088/1748-0221/14/06/C06006
http://cds.cern.ch/record/2665944
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