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Polymers in microlithography
| Autores principales: | , , |
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| Lenguaje: | eng |
| Publicado: |
American Chemical Society
1989
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/2685459 |
| _version_ | 1780963410640371712 |
|---|---|
| author | Reichmanis, Elsa MacDonald, Scott A Iwayanagi, Takao |
| author_facet | Reichmanis, Elsa MacDonald, Scott A Iwayanagi, Takao |
| author_sort | Reichmanis, Elsa |
| collection | CERN |
| id | cern-2685459 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1989 |
| publisher | American Chemical Society |
| record_format | invenio |
| spelling | cern-26854592021-04-21T18:21:00Zhttp://cds.cern.ch/record/2685459engReichmanis, ElsaMacDonald, Scott AIwayanagi, TakaoPolymers in microlithographyEngineeringAmerican Chemical Societyoai:cds.cern.ch:26854591989 |
| spellingShingle | Engineering Reichmanis, Elsa MacDonald, Scott A Iwayanagi, Takao Polymers in microlithography |
| title | Polymers in microlithography |
| title_full | Polymers in microlithography |
| title_fullStr | Polymers in microlithography |
| title_full_unstemmed | Polymers in microlithography |
| title_short | Polymers in microlithography |
| title_sort | polymers in microlithography |
| topic | Engineering |
| url | http://cds.cern.ch/record/2685459 |
| work_keys_str_mv | AT reichmaniselsa polymersinmicrolithography AT macdonaldscotta polymersinmicrolithography AT iwayanagitakao polymersinmicrolithography |