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Polymers in microlithography

Detalles Bibliográficos
Autores principales:	Reichmanis, Elsa, MacDonald, Scott A, Iwayanagi, Takao
Lenguaje:	eng
Publicado:	American Chemical Society 1989
Materias:	Engineering
Acceso en línea:	http://cds.cern.ch/record/2685459

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