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Materials for microlithography
| Autores principales: | , , |
|---|---|
| Lenguaje: | eng |
| Publicado: |
American Chemical Society
1984
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/2685495 |
| _version_ | 1780963418350551040 |
|---|---|
| author | Thompson, L F Willson, C G Frechet, J M J |
| author_facet | Thompson, L F Willson, C G Frechet, J M J |
| author_sort | Thompson, L F |
| collection | CERN |
| id | cern-2685495 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1984 |
| publisher | American Chemical Society |
| record_format | invenio |
| spelling | cern-26854952021-04-21T18:20:55Zhttp://cds.cern.ch/record/2685495engThompson, L FWillson, C GFrechet, J M JMaterials for microlithographyEngineeringAmerican Chemical Societyoai:cds.cern.ch:26854951984 |
| spellingShingle | Engineering Thompson, L F Willson, C G Frechet, J M J Materials for microlithography |
| title | Materials for microlithography |
| title_full | Materials for microlithography |
| title_fullStr | Materials for microlithography |
| title_full_unstemmed | Materials for microlithography |
| title_short | Materials for microlithography |
| title_sort | materials for microlithography |
| topic | Engineering |
| url | http://cds.cern.ch/record/2685495 |
| work_keys_str_mv | AT thompsonlf materialsformicrolithography AT willsoncg materialsformicrolithography AT frechetjmj materialsformicrolithography |