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Microelectronics processing
| Autores principales: | , |
|---|---|
| Lenguaje: | eng |
| Publicado: |
American Chemical Society
1989
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/2685564 |
| _version_ | 1780963435463311360 |
|---|---|
| author | Hess, Dennis W Jensen, Klavs F |
| author_facet | Hess, Dennis W Jensen, Klavs F |
| author_sort | Hess, Dennis W |
| collection | CERN |
| id | cern-2685564 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1989 |
| publisher | American Chemical Society |
| record_format | invenio |
| spelling | cern-26855642021-04-21T18:20:46Zhttp://cds.cern.ch/record/2685564engHess, Dennis WJensen, Klavs FMicroelectronics processingEngineeringAmerican Chemical Societyoai:cds.cern.ch:26855641989 |
| spellingShingle | Engineering Hess, Dennis W Jensen, Klavs F Microelectronics processing |
| title | Microelectronics processing |
| title_full | Microelectronics processing |
| title_fullStr | Microelectronics processing |
| title_full_unstemmed | Microelectronics processing |
| title_short | Microelectronics processing |
| title_sort | microelectronics processing |
| topic | Engineering |
| url | http://cds.cern.ch/record/2685564 |
| work_keys_str_mv | AT hessdennisw microelectronicsprocessing AT jensenklavsf microelectronicsprocessing |