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Through silicon vias production
Autor principal: | |
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Formato: | info:eu-repo/semantics/article |
Lenguaje: | eng |
Publicado: |
2019
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/2705369 |
_version_ | 1780964806156615680 |
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author | Re, Valerio |
author_facet | Re, Valerio |
author_sort | Re, Valerio |
collection | CERN |
format | info:eu-repo/semantics/article |
id | cern-2705369 |
institution | Organización Europea para la Investigación Nuclear |
language | eng |
publishDate | 2019 |
record_format | invenio |
spelling | cern-27053692019-12-19T20:57:25Z http://cds.cern.ch/record/2705369 eng Re, Valerio Through silicon vias production Detectors and Experimental Techniques 4: Micro-electronics and interconnections info:eu-repo/grantAgreement/EC/FP7/654168 info:eu-repo/semantics/openAccess Education Level info:eu-repo/semantics/article http://cds.cern.ch/record/2705369 2019 |
spellingShingle | Detectors and Experimental Techniques 4: Micro-electronics and interconnections Re, Valerio Through silicon vias production |
title | Through silicon vias production |
title_full | Through silicon vias production |
title_fullStr | Through silicon vias production |
title_full_unstemmed | Through silicon vias production |
title_short | Through silicon vias production |
title_sort | through silicon vias production |
topic | Detectors and Experimental Techniques 4: Micro-electronics and interconnections |
url | http://cds.cern.ch/record/2705369 http://cds.cern.ch/record/2705369 |
work_keys_str_mv | AT revalerio throughsiliconviasproduction |