IHEP-NDL prototype LGAD sensors for HGTD

A High-Granularity Timing Detector (HGTD), based on Low-Gain Avalanche Detector (LGAD) technology, is proposed for the ATLAS Phase-II upgrade. In this contribution, we present new developments in the production of LGAD by NDL (Novel Device Laboratory, Beijing) and IHEP. NDL has delivered three batches of LGAD prototype sensors at the beginning of 2019. These sensors are fabricated with 30um high resistivity epitaxial silicon layer. Time resolution of