Vertex and tracking detector R&D for CLIC

The physics goals at the proposed future Compact Linear Collider (CLIC) pose challenging demands on the performance of the detector system. Precise hit-time tagging with a few nanoseconds resolution is required for the vertex and tracking detectors, as well as a very low mass per layer combined with a single-plane spatial resolution of a few micrometers. To address these requirements, an all silicon vertex and tracking system is foreseen at CLIC. To this end, a broad R&D program on new silicon detector technologies is being pursued. While the silicon pixel R&D for the CLIC vertex detector and tracker covers a wide range over various technologies and the development of different tools, this contribution is mainly focussed on the development of monolithic CMOS sensors with a small collection electrode.