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Handbook of Cleaning for Semiconductor Manufacturing: Fundamentals and Applications
| Autor principal: | |
|---|---|
| Lenguaje: | eng |
| Publicado: |
Wiley
2011
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/2732660 |
| _version_ | 1780966841164759040 |
|---|---|
| author | Reinhardt, Karen |
| author_facet | Reinhardt, Karen |
| author_sort | Reinhardt, Karen |
| collection | CERN |
| id | cern-2732660 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2011 |
| publisher | Wiley |
| record_format | invenio |
| spelling | cern-27326602021-04-21T18:02:17Zhttp://cds.cern.ch/record/2732660engReinhardt, KarenHandbook of Cleaning for Semiconductor Manufacturing: Fundamentals and ApplicationsXXWileyoai:cds.cern.ch:27326602011 |
| spellingShingle | XX Reinhardt, Karen Handbook of Cleaning for Semiconductor Manufacturing: Fundamentals and Applications |
| title | Handbook of Cleaning for Semiconductor Manufacturing: Fundamentals and Applications |
| title_full | Handbook of Cleaning for Semiconductor Manufacturing: Fundamentals and Applications |
| title_fullStr | Handbook of Cleaning for Semiconductor Manufacturing: Fundamentals and Applications |
| title_full_unstemmed | Handbook of Cleaning for Semiconductor Manufacturing: Fundamentals and Applications |
| title_short | Handbook of Cleaning for Semiconductor Manufacturing: Fundamentals and Applications |
| title_sort | handbook of cleaning for semiconductor manufacturing: fundamentals and applications |
| topic | XX |
| url | http://cds.cern.ch/record/2732660 |
| work_keys_str_mv | AT reinhardtkaren handbookofcleaningforsemiconductormanufacturingfundamentalsandapplications |