Cargando…
Ion implantation in semiconductors
| Autores principales: | , |
|---|---|
| Lenguaje: | eng |
| Publicado: |
Trans Tech Publications
1988
|
| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/2758006 |
| _version_ | 1780970067059539968 |
|---|---|
| author | Stiévenard, D Bourgoin, J C |
| author_facet | Stiévenard, D Bourgoin, J C |
| author_sort | Stiévenard, D |
| collection | CERN |
| id | cern-2758006 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1988 |
| publisher | Trans Tech Publications |
| record_format | invenio |
| spelling | cern-27580062021-04-21T16:40:44Zhttp://cds.cern.ch/record/2758006engStiévenard, DBourgoin, J CIon implantation in semiconductorsXXTrans Tech Publicationsoai:cds.cern.ch:27580061988 |
| spellingShingle | XX Stiévenard, D Bourgoin, J C Ion implantation in semiconductors |
| title | Ion implantation in semiconductors |
| title_full | Ion implantation in semiconductors |
| title_fullStr | Ion implantation in semiconductors |
| title_full_unstemmed | Ion implantation in semiconductors |
| title_short | Ion implantation in semiconductors |
| title_sort | ion implantation in semiconductors |
| topic | XX |
| url | http://cds.cern.ch/record/2758006 |
| work_keys_str_mv | AT stievenardd ionimplantationinsemiconductors AT bourgoinjc ionimplantationinsemiconductors |