Gettering and defect engineering in semiconductor technology IV

Proceedings of the 4th International Conference on Gettering and Defect Engineering In Semiconductor Technology (GADEST '91), Frankfurt, Germany, October 1991.

Detalles Bibliográficos
Autores principales: Kittler, M, Richter, H
Lenguaje:eng
Publicado: Trans Tech Publications 1991
Materias:
XX
Acceso en línea:http://cds.cern.ch/record/2758008
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author Kittler, M
Richter, H
author_facet Kittler, M
Richter, H
author_sort Kittler, M
collection CERN
description Proceedings of the 4th International Conference on Gettering and Defect Engineering In Semiconductor Technology (GADEST '91), Frankfurt, Germany, October 1991.
id cern-2758008
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 1991
publisher Trans Tech Publications
record_format invenio
spelling cern-27580082021-04-21T16:40:44Zhttp://cds.cern.ch/record/2758008engKittler, MRichter, HGettering and defect engineering in semiconductor technology IVXXProceedings of the 4th International Conference on Gettering and Defect Engineering In Semiconductor Technology (GADEST '91), Frankfurt, Germany, October 1991.Trans Tech Publicationsoai:cds.cern.ch:27580081991
spellingShingle XX
Kittler, M
Richter, H
Gettering and defect engineering in semiconductor technology IV
title Gettering and defect engineering in semiconductor technology IV
title_full Gettering and defect engineering in semiconductor technology IV
title_fullStr Gettering and defect engineering in semiconductor technology IV
title_full_unstemmed Gettering and defect engineering in semiconductor technology IV
title_short Gettering and defect engineering in semiconductor technology IV
title_sort gettering and defect engineering in semiconductor technology iv
topic XX
url http://cds.cern.ch/record/2758008
work_keys_str_mv AT kittlerm getteringanddefectengineeringinsemiconductortechnologyiv
AT richterh getteringanddefectengineeringinsemiconductortechnologyiv

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