Gettering and defect engineering in semiconductor technology IV

Proceedings of the 4th International Conference on Gettering and Defect Engineering In Semiconductor Technology (GADEST '91), Frankfurt, Germany, October 1991.

Detalles Bibliográficos
Autores principales: Kittler, M, Richter, H
Lenguaje:eng
Publicado: Trans Tech Publications 1991
Materias:
XX
Acceso en línea:http://cds.cern.ch/record/2758008

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