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Trends in ion implantation
| Autor principal: | |
|---|---|
| Lenguaje: | eng |
| Publicado: |
Trans Tech Publications
1992
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/2762288 |
| _version_ | 1780970681423364096 |
|---|---|
| author | van Rossum, Marc |
| author_facet | van Rossum, Marc |
| author_sort | van Rossum, Marc |
| collection | CERN |
| id | cern-2762288 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1992 |
| publisher | Trans Tech Publications |
| record_format | invenio |
| spelling | cern-27622882021-04-21T16:39:09Zhttp://cds.cern.ch/record/2762288engvan Rossum, MarcTrends in ion implantationXXTrans Tech Publicationsoai:cds.cern.ch:27622881992 |
| spellingShingle | XX van Rossum, Marc Trends in ion implantation |
| title | Trends in ion implantation |
| title_full | Trends in ion implantation |
| title_fullStr | Trends in ion implantation |
| title_full_unstemmed | Trends in ion implantation |
| title_short | Trends in ion implantation |
| title_sort | trends in ion implantation |
| topic | XX |
| url | http://cds.cern.ch/record/2762288 |
| work_keys_str_mv | AT vanrossummarc trendsinionimplantation |