Gettering and defect engineering in semiconductor technology X

GADEST 2003 Proceedings of the 10th International Autumn Meeting on Gettering anf Defect Engineering in Semiconductor Technology, September 21-26, 2003, Brandenburg, Germany.

Detalles Bibliográficos
Autores principales: Richter, Hans, Kittler, Martin
Lenguaje:eng
Publicado: Trans Tech Publications 2004
Materias:
XX
Acceso en línea:http://cds.cern.ch/record/2762301
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author Richter, Hans
Kittler, Martin
author_facet Richter, Hans
Kittler, Martin
author_sort Richter, Hans
collection CERN
description GADEST 2003 Proceedings of the 10th International Autumn Meeting on Gettering anf Defect Engineering in Semiconductor Technology, September 21-26, 2003, Brandenburg, Germany.
id cern-2762301
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2004
publisher Trans Tech Publications
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spelling cern-27623012021-04-21T16:39:09Zhttp://cds.cern.ch/record/2762301engRichter, HansKittler, MartinGettering and defect engineering in semiconductor technology XXXGADEST 2003 Proceedings of the 10th International Autumn Meeting on Gettering anf Defect Engineering in Semiconductor Technology, September 21-26, 2003, Brandenburg, Germany.Trans Tech Publicationsoai:cds.cern.ch:27623012004
spellingShingle XX
Richter, Hans
Kittler, Martin
Gettering and defect engineering in semiconductor technology X
title Gettering and defect engineering in semiconductor technology X
title_full Gettering and defect engineering in semiconductor technology X
title_fullStr Gettering and defect engineering in semiconductor technology X
title_full_unstemmed Gettering and defect engineering in semiconductor technology X
title_short Gettering and defect engineering in semiconductor technology X
title_sort gettering and defect engineering in semiconductor technology x
topic XX
url http://cds.cern.ch/record/2762301
work_keys_str_mv AT richterhans getteringanddefectengineeringinsemiconductortechnologyx
AT kittlermartin getteringanddefectengineeringinsemiconductortechnologyx

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