Gettering and defect engineering in semiconductor technology X

GADEST 2003 Proceedings of the 10th International Autumn Meeting on Gettering anf Defect Engineering in Semiconductor Technology, September 21-26, 2003, Brandenburg, Germany.

Detalles Bibliográficos
Autores principales: Richter, Hans, Kittler, Martin
Lenguaje:eng
Publicado: Trans Tech Publications 2004
Materias:
XX
Acceso en línea:http://cds.cern.ch/record/2762301

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