Gettering and defect engineering in semiconductor technology IX

GADEST 2001 Proceedings of the 9th Int. Conference on Gettering anf Defect Engineering in Semiconductor Technology , S. Tecla, Italy.

Detalles Bibliográficos
Autores principales: Raineri, Vito, Priolo, F, Kittler, Martin, Richter, Hans
Lenguaje:eng
Publicado: Trans Tech Publications 2002
Materias:
XX
Acceso en línea:http://cds.cern.ch/record/2762378
Descripción
Sumario:GADEST 2001 Proceedings of the 9th Int. Conference on Gettering anf Defect Engineering in Semiconductor Technology , S. Tecla, Italy.

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