Gettering and defect engineering in semiconductor technology IX

GADEST 2001 Proceedings of the 9th Int. Conference on Gettering anf Defect Engineering in Semiconductor Technology , S. Tecla, Italy.

Detalles Bibliográficos
Autores principales: Raineri, Vito, Priolo, F, Kittler, Martin, Richter, Hans
Lenguaje:eng
Publicado: Trans Tech Publications 2002
Materias:
XX
Acceso en línea:http://cds.cern.ch/record/2762378
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author Raineri, Vito
Priolo, F
Kittler, Martin
Richter, Hans
author_facet Raineri, Vito
Priolo, F
Kittler, Martin
Richter, Hans
author_sort Raineri, Vito
collection CERN
description GADEST 2001 Proceedings of the 9th Int. Conference on Gettering anf Defect Engineering in Semiconductor Technology , S. Tecla, Italy.
id cern-2762378
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2002
publisher Trans Tech Publications
record_format invenio
spelling cern-27623782021-04-21T16:39:05Zhttp://cds.cern.ch/record/2762378engRaineri, VitoPriolo, FKittler, MartinRichter, HansGettering and defect engineering in semiconductor technology IXXXGADEST 2001 Proceedings of the 9th Int. Conference on Gettering anf Defect Engineering in Semiconductor Technology , S. Tecla, Italy.Trans Tech Publicationsoai:cds.cern.ch:27623782002
spellingShingle XX
Raineri, Vito
Priolo, F
Kittler, Martin
Richter, Hans
Gettering and defect engineering in semiconductor technology IX
title Gettering and defect engineering in semiconductor technology IX
title_full Gettering and defect engineering in semiconductor technology IX
title_fullStr Gettering and defect engineering in semiconductor technology IX
title_full_unstemmed Gettering and defect engineering in semiconductor technology IX
title_short Gettering and defect engineering in semiconductor technology IX
title_sort gettering and defect engineering in semiconductor technology ix
topic XX
url http://cds.cern.ch/record/2762378
work_keys_str_mv AT rainerivito getteringanddefectengineeringinsemiconductortechnologyix
AT priolof getteringanddefectengineeringinsemiconductortechnologyix
AT kittlermartin getteringanddefectengineeringinsemiconductortechnologyix
AT richterhans getteringanddefectengineeringinsemiconductortechnologyix

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