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Beam injection assessment of microstructures in semiconductors

BIAMS 2000.

Detalles Bibliográficos
Autores principales:	Tomokage, H, Sekiguchi, Takashi
Lenguaje:	eng
Publicado:	Trans Tech Publications 2001
Materias:	XX
Acceso en línea:	http://cds.cern.ch/record/2762385

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