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Beam injection assessment of microstructures in semiconductors
BIAMS 2000.
Autores principales: | Tomokage, H, Sekiguchi, Takashi |
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Lenguaje: | eng |
Publicado: |
Trans Tech Publications
2001
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/2762385 |
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