Gettering and defect engineering in semiconductor technology VII

GADEST 1997 Proceedings of the 7th International Autumn Meeting on Gettering and Defect Engineering in Semiconductor Technology (GADEST '97), Spa, Belgium, October 1997.

Detalles Bibliográficos
Autores principales: Claeys, Cor, Vanhellemont, Jan, Richter, Hans, Kittler, Martin
Lenguaje:eng
Publicado: Trans Tech Publications 1997
Materias:
XX
Acceso en línea:http://cds.cern.ch/record/2762395
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author Claeys, Cor
Vanhellemont, Jan
Richter, Hans
Kittler, Martin
author_facet Claeys, Cor
Vanhellemont, Jan
Richter, Hans
Kittler, Martin
author_sort Claeys, Cor
collection CERN
description GADEST 1997 Proceedings of the 7th International Autumn Meeting on Gettering and Defect Engineering in Semiconductor Technology (GADEST '97), Spa, Belgium, October 1997.
id cern-2762395
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 1997
publisher Trans Tech Publications
record_format invenio
spelling cern-27623952021-04-21T16:39:04Zhttp://cds.cern.ch/record/2762395engClaeys, CorVanhellemont, JanRichter, HansKittler, MartinGettering and defect engineering in semiconductor technology VIIXXGADEST 1997 Proceedings of the 7th International Autumn Meeting on Gettering and Defect Engineering in Semiconductor Technology (GADEST '97), Spa, Belgium, October 1997.Trans Tech Publicationsoai:cds.cern.ch:27623951997
spellingShingle XX
Claeys, Cor
Vanhellemont, Jan
Richter, Hans
Kittler, Martin
Gettering and defect engineering in semiconductor technology VII
title Gettering and defect engineering in semiconductor technology VII
title_full Gettering and defect engineering in semiconductor technology VII
title_fullStr Gettering and defect engineering in semiconductor technology VII
title_full_unstemmed Gettering and defect engineering in semiconductor technology VII
title_short Gettering and defect engineering in semiconductor technology VII
title_sort gettering and defect engineering in semiconductor technology vii
topic XX
url http://cds.cern.ch/record/2762395
work_keys_str_mv AT claeyscor getteringanddefectengineeringinsemiconductortechnologyvii
AT vanhellemontjan getteringanddefectengineeringinsemiconductortechnologyvii
AT richterhans getteringanddefectengineeringinsemiconductortechnologyvii
AT kittlermartin getteringanddefectengineeringinsemiconductortechnologyvii

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