Gettering and defect engineering in semiconductor technology VII

GADEST 1997 Proceedings of the 7th International Autumn Meeting on Gettering and Defect Engineering in Semiconductor Technology (GADEST '97), Spa, Belgium, October 1997.

Detalles Bibliográficos
Autores principales: Claeys, Cor, Vanhellemont, Jan, Richter, Hans, Kittler, Martin
Lenguaje:eng
Publicado: Trans Tech Publications 1997
Materias:
XX
Acceso en línea:http://cds.cern.ch/record/2762395

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