Performance Studies of the ATLASpix HV-MAPS Prototype for Different Substrate Resistivities

The ATLASpix high-voltage monolithic active pixel sensor (HV-MAPS) was designed as a technology demonstrator for the ATLAS ITk Upgrade and the CLIC tracking detector. In this contribution new results from laboratory-based energy calibration measurements using fluorescence X-rays are presented for the matrix. These findings are complemented by new results from test-beam studies with inclined tracks, in which the active charge collection depth is determined.