A generalized fitting tool for analysis of two-dimensional channeling patterns

The acquisition of two-dimensional (2D) channeling patterns is gaining increased popularity within the ion beam community. However, with the exception of emission channeling experiments for the lattice location of radioactive impurities, quantitative analysis of such patterns is rarely found. We present a general description of the statistical data analysis methodology for 2D channeling patterns, which consists of comparing experimental data by means of a fit procedure to theoretical yield distributions. The developed software allows for chi-square or maximum likelihood-based fits, optimizing the orientation of the theoretical vs the experimental pattern, as well as the best choice of random level, and providing fractions for the contributions from several theoretical patterns related to different lattice sites. Optionally also the angular resolution can be used as a fit parameter. Use of the software is illustrated by examples of electron emission channeling from $^{27}$Mg in GaN, as well as $^{4}$He RBS channeling from Ge.