A Sub-Picosecond Digitally-Controlled Phase Delay

<!--HTML-->The use of precision timing measurements will be a major tool at the HL-LHC, where it will be used to suppress pile-up and to search for long-lived particles. To control a reference clock with sub-picosecond accuracy, we have fabricated in the TSMC 65nm process a digitally controlled phase shifter. It is composed of a chain of 66 cells, each with a digitally controlled planar wave guide with either a short or long delay. With this a reference clock's phase can be controlled to a precision of 200 fs with dynamic range of 13 ps.