Module development for the ATLAS ITk Pixel Detector

After the upgrade of the LHC to the High-Luminosity-LHC (HL-LHC), the instantaneous luminosity will reach unprecedented values, resulting in about 200 proton-proton interactions in a typical bunch crossing. The current ATLAS Inner Detector will be replaced by an all-silicon system, the Inner Tracker (ITk). The innermost part of ITk will consist of a state-of-the-art pixel detector. The individual modules of the ITk Pixel Detector comprise silicon sensors using various different technologies, with the sensors readout using the new ITkPix ASIC.