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10th International Conference on Ion-implantation Technology
Autores principales: | , , , |
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Lenguaje: | eng |
Publicado: |
1995
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/280614 |
_version_ | 1780887919950561280 |
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author | Coffa, Salvatore Ferla, Giuseppe Priolo, Francesco Rimini, Emanuele |
author_facet | Coffa, Salvatore Ferla, Giuseppe Priolo, Francesco Rimini, Emanuele |
author_sort | Coffa, Salvatore |
collection | CERN |
id | cern-280614 |
institution | Organización Europea para la Investigación Nuclear |
language | eng |
publishDate | 1995 |
record_format | invenio |
spelling | cern-2806142021-07-30T13:22:53Zhttp://cds.cern.ch/record/280614engCoffa, SalvatoreFerla, GiuseppePriolo, FrancescoRimini, Emanuele10th International Conference on Ion-implantation TechnologyEngineeringoai:cds.cern.ch:2806141995 |
spellingShingle | Engineering Coffa, Salvatore Ferla, Giuseppe Priolo, Francesco Rimini, Emanuele 10th International Conference on Ion-implantation Technology |
title | 10th International Conference on Ion-implantation Technology |
title_full | 10th International Conference on Ion-implantation Technology |
title_fullStr | 10th International Conference on Ion-implantation Technology |
title_full_unstemmed | 10th International Conference on Ion-implantation Technology |
title_short | 10th International Conference on Ion-implantation Technology |
title_sort | 10th international conference on ion-implantation technology |
topic | Engineering |
url | http://cds.cern.ch/record/280614 |
work_keys_str_mv | AT coffasalvatore 10thinternationalconferenceonionimplantationtechnology AT ferlagiuseppe 10thinternationalconferenceonionimplantationtechnology AT priolofrancesco 10thinternationalconferenceonionimplantationtechnology AT riminiemanuele 10thinternationalconferenceonionimplantationtechnology |