Study of irradiated 3D pixel sensors from CNM

The High-Luminosity upgrade of the Large Hadron Collider will force the experiments to cope with harsh radiation environments. The CMS Collaboration has decided to install 3D pixel sensors in the innermost barrel layer of the tracking system, which has to face a fluence of $2\times10^{16}\,\textnormal{n}_\textnormal{eq}\textnormal{cm}^\textnormal{-2}$ before replacement. This pixel technology should maintain high detection efficiency and manageable power dissipation at such unprecedented fluences. Results from beam test experiments with 3D pixel sensors fabricated at IMB-CNM and bump-bonded to RD53A readout chips are presented. The irradiation with protons of 400 MeV-momentum to fluences of roughly $1.3\mbox{--}2.0\times10^{16}\,\textnormal{n}_\textnormal{eq}\textnormal{cm}^\textnormal{-2}$ as well as the measurement of these sensors in a test beam have been both performed at Fermilab.