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Ion implantation, sputtering and their applications
| Autores principales: | , , |
|---|---|
| Lenguaje: | eng |
| Publicado: |
Academic Press
1976
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/282550 |
| _version_ | 1780888048278437888 |
|---|---|
| author | Townsend, P D Hartley, N E W Kelly, J C |
| author_facet | Townsend, P D Hartley, N E W Kelly, J C |
| author_sort | Townsend, P D |
| collection | CERN |
| id | cern-282550 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1976 |
| publisher | Academic Press |
| record_format | invenio |
| spelling | cern-2825502021-04-22T03:38:55Zhttp://cds.cern.ch/record/282550engTownsend, P DHartley, N E WKelly, J CIon implantation, sputtering and their applicationsOther Fields of PhysicsAcademic Pressoai:cds.cern.ch:2825501976 |
| spellingShingle | Other Fields of Physics Townsend, P D Hartley, N E W Kelly, J C Ion implantation, sputtering and their applications |
| title | Ion implantation, sputtering and their applications |
| title_full | Ion implantation, sputtering and their applications |
| title_fullStr | Ion implantation, sputtering and their applications |
| title_full_unstemmed | Ion implantation, sputtering and their applications |
| title_short | Ion implantation, sputtering and their applications |
| title_sort | ion implantation, sputtering and their applications |
| topic | Other Fields of Physics |
| url | http://cds.cern.ch/record/282550 |
| work_keys_str_mv | AT townsendpd ionimplantationsputteringandtheirapplications AT hartleynew ionimplantationsputteringandtheirapplications AT kellyjc ionimplantationsputteringandtheirapplications |