Comparison of different sensor thicknesses and substrate materials for the monolithic small collection-electrode technology demonstrator CLICTD

Small collection-electrode monolithic CMOS sensors profit from a high signal-to-noise ratio and a small power consumption, but have a limited active sensor volume due to the fabrication process based on thin high-resistivity epitaxial layers. In this paper, the active sensor depth is investigated in...

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Detalles Bibliográficos
Autores principales: Dort, Katharina, Ballabriga, Rafael, Braach, Justus, Buschmann, Eric, Campbell, Michael, Dannheim, Dominik, Huth, Lennart, Kremastiotis, Iraklis, Kröger, Jens, Linssen, Lucie, Munker, Magdalena, Snoeys, Walter, Spannagel, Simon, Švihra, Peter, Vanat, Tomas
Lenguaje:eng
Publicado: 2022
Materias:
physics.ins-det
Detectors and Experimental Techniques
Acceso en línea:https://dx.doi.org/10.1016/j.nima.2022.167413
http://cds.cern.ch/record/2826909

Internet

https://dx.doi.org/10.1016/j.nima.2022.167413
http://cds.cern.ch/record/2826909

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