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Plasma-assisted coatings for applications in ultrahigh vacuum
<!--HTML--><p><span style="color:#4e5f70;"><span>Physical Vapor Deposition (PVD) with plasma assistance offer great flexibility to produce coatings that are ultrahigh vacuum (UHV) compatible and designed to improve surface properties with respect to applications. Am...
Autor principal: | Anders, André |
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Lenguaje: | eng |
Publicado: |
2022
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/2838325 |
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