Development of systems and test of devices for the ATLAS ITk detector moving from R$\&$D to construction

In view of the High Luminosity project at the Large Hadron Collider (HL-LHC), the CERN largest hadron accelerator and collider, the ATLAS tracking system will be completely replaced. The ITk will be the new all-silicon tracker. Due to their radiation hardness, 3D pixel sensors have been chosen to instrument the innermost layer of the detector. This document focuses on the qualification of the first pre-production 3D pixel modules, made by Fondazione Bruno Kessler (FBK). Radiation hardness and efficiency were mainly studied. These modules were the first ITk pre-production modules in the project, as FBK 3D sensors are the very first sensors produced for the detector installation. The modules were first characterized in the laboratory of INFN Genova and then tested on the beam at Proton Synchrotron (PS) and Super Proton Synchrotron (SPS) test beam facilities, at CERN. The data analysis shows a global efficiency of $(98.87 \pm 0.06)\%$ for these devices, before irradiation, in compliance with the requirements. Moreover, two modules were irradiated in Bonn with 15 MeV protons up to $1\cdot10^{16}$n$_{eq}$/cm$^2$ and then tested again on the beam. After irradiation, the mean efficiency is $(98.5\pm0.1)\%$ when modules are placed perpendicular to the beam and $(99.9 \pm 0.1)\%$ when measured with an angle of $15^\circ$ respect to the beam. Therefore sensors meet the ITk requirement to have a mean efficiency higher than $96\%$ ($97\%$) in the perpendicular (tilted) configuration after irradiation.