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Methods for obtaining a uniform volume concentration of implanted ions
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Lenguaje: | eng |
Publicado: |
1995
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Acceso en línea: | http://cds.cern.ch/record/284105 |
_version_ | 1780888144774692864 |
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author | Reutov, V F |
author_facet | Reutov, V F |
author_sort | Reutov, V F |
collection | CERN |
id | cern-284105 |
institution | Organización Europea para la Investigación Nuclear |
language | eng |
publishDate | 1995 |
record_format | invenio |
spelling | cern-2841052019-09-30T06:29:59Zhttp://cds.cern.ch/record/284105engReutov, V FMethods for obtaining a uniform volume concentration of implanted ionsHealth Physics and Radiation EffectsE14-95-56oai:cds.cern.ch:2841051995-03-03 |
spellingShingle | Health Physics and Radiation Effects Reutov, V F Methods for obtaining a uniform volume concentration of implanted ions |
title | Methods for obtaining a uniform volume concentration of implanted ions |
title_full | Methods for obtaining a uniform volume concentration of implanted ions |
title_fullStr | Methods for obtaining a uniform volume concentration of implanted ions |
title_full_unstemmed | Methods for obtaining a uniform volume concentration of implanted ions |
title_short | Methods for obtaining a uniform volume concentration of implanted ions |
title_sort | methods for obtaining a uniform volume concentration of implanted ions |
topic | Health Physics and Radiation Effects |
url | http://cds.cern.ch/record/284105 |
work_keys_str_mv | AT reutovvf methodsforobtainingauniformvolumeconcentrationofimplantedions |