ATLAS17LS – A large-format prototype silicon strip sensor for long-strip barrel section of ATLAS ITk strip detector

The ATLAS experiment is going to replace the current Inner Detector with an all new inner tracker (ITk) in the ATLAS detector for HL-LHC at CERN. Silicon strip detectors cover the outer layers of the barrel and the endcap sections. We have designed and fabricated a prototype single-sided n + -in-p AC-coupled silicon strip sensor for the outer barrel layer with long strips (LS), ATLAS17LS. It is of the maximum allowable size to fit in a 6-in. silicon wafer, with an outer dimension of 9.80 (width) × 9.76 (length) cm 2 . The sensor features two rows of LS strip segments, 4.83 cm strip length per segment, a strip pitch of 75.5 μm , and a slim edge design. We have implemented technology for high voltage operation of up to 1000 V, with a good signal collection after irradiation fluence of 5.6 × 10 14 neq∕cm2 at the end of HL-LHC operation.