ATLAS ITkPix Pre-production Planar Sensor Level Characterisation for the HL-LHC Upgrade

In the ATLAS detector upgrade for the High-Luminosity LHC (HL-LHC), the current Inner Detector will be upgraded to an all-silicon Inner Tracker (ITk), to operate under higher occupancy (instantaneous luminosity $7.5 \times 10^{34}\;\rm s^{-1}cm^{-2}$, which correspond to 200 inelastic pp collisions per bunch crossing) and radiation damage (fluence $2\times10^{16}\;\rm n_{eq}/cm^2$). The data taking is planned to start in 2029 and last for 10\,years. The innermost part of the ITk will be equipped with pixel modules, consisting of pixel sensors and novel ASICs, implemented in 65\,nm CMOS technology. The ITk project is currently in pre-production stage. To be assured that specifications will be met during production, sensors and test structures from different vendors were sent to different sites for irradiation, hybridisation and follow-up testing. This talk shows the ITkPix pre-production planar sensor level characterisation measurement result.